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Jul 06, 2025
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MFT 211 - Material Safety and Equipment Overview
Credits: 3
2 Lecture Hours 2 Lab Hours
Co-requisites: MFT 212
Description
This course provides an overview of basic nanofabrication processing equipment and materials handling procedures with a focus on safety, environment and health issues. Topics covered include: working in a cleanroom environment, usage of a variety of systems including vacuum pump systems, thermal processing equipment, chemical vapor deposition systems and vacuum deposition/ etching systems. Specific material handling issues include those arising from using de-ionized water, solvents, cleansers, organic materials, ion implementation sources, diffusion sources, photo-resists, developers, metal dielectrics and toxic, flammable, corrosive and high purity gases as well as packaging materials.
Learning Outcomes
Upon successful completion of the course, the student will:
- Utilize proper safety and hygiene rules in nanofabrication processing.
- Explain the operation of vacuum pumps and gauges used to measure of vacuum pressure.
- Apply safe material handling techniques.
- Handle and dispose biological materials and nanoscale particles according to environmental and safety regulations.
- Design and build a basic vacuum system.
- Operate a thermal evaporator from pump down through gold deposition.
- Examine and operate a Residual Gas Analyzer (RGA).
- Analyze a vacuum processing chamber with RGA.
- Use profilometer and optical microscopes to characterize surface roughness and microscale features.
- Operate a Low Pressure Chemical Vapor Deposition (LPCVD) reactor.
Listed Topics
- Overview of safety, health and environmental issues
- Cleanroom operation
- Vacuum pump systems
- Vacuum accessories
- Gas delivery
- Metrology
- Thermal evaporators
- Chemical handling techniques
- Vacuum-based processing control
- Plasma-based processing
- Equipment overview
Reference Materials
Instructor-approved textbook and materials.
Students who successfully complete this course acquire general knowledge, skills and abilities that align with CCAC’s definition of an educated person. Specifically, this course fulfills these General Education Goals: Approved By: Dr. Quintin B. Bullock Date Approved: 04/12/2024
Last Reviewed: 04/12/2024
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