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Jul 06, 2025
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MFT 212 - Basic Nanofabrication Processes
Credits: 3
2 Lecture Hours 2 Lab Hours
Co-requisites: MFT 211
Description
This course provides an overview of basic processing steps used in all applications of nanofabrication. Both top-down and bottom-up methods of nanofabrication are included. The majority of the course details a step-by-step description of the equipment and processes needed to fabricate devices and structures such as bio-chips, Complementary Metal Oxide Semiconductor (CMOS) transistors, power devices, Microelectromechanical (MEMS) devices and optoelectronic structures. Students learn the similarities and differences in both the equipment and process flows needed for the fabrication of these structures.
Learning Outcomes
Upon successful completion of the course, the student will:
- Identify proper safety practices that apply to cleanroom behavior.
- Measure the electrical characteristics of a p-n junction.
- Apply the process of lithography to silicon wafers.
- Explain the operational principles of an Atomic Force Microscope (AFM).
- Operate the AFM in contact mode.
- Evaporate Gold features through a shadow mask.
- Describe the importance of process control and contamination prevention methods.
- Recognize how to exploit the properties of work functions and electronegativity to produce nanostructures and devices.
- Determine the relative adhesion of different metals on commonly-used industrial substrates.
- Quantify the etch rates of photoresists.
- Use spectrophotometry to measure chemical concentrations.
Listed Topics
- Materials overview
- P-n junctions
- The oxidation furnace
- Chemical vapor deposition
- Plasma etching
- Ion implantation
- Etching
- NPN transistors
- CMOS transistors
- MEMS and biomedical devices
Reference Materials
Instructor-approved textbook and materials.
Students who successfully complete this course acquire general knowledge, skills and abilities that align with CCAC’s definition of an educated person. Specifically, this course fulfills these General Education Goals: - Quantitative & Scientific Reasoning
- Technological Competence
Approved By: Dr. Quintin B. Bullock Date Approved: 04/12/2024
Last Reviewed: 04/12/2024
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