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Apr 24, 2024
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MFT 211 - Material Safety/Equipment Overview
Credits: 3
2 Lecture Hours 2 Lab Hours
Co-requisites: MFT 212
This course provides an overview of basic nanofabrication processing equipment and materials handling procedures with a focus on safety, environment and health issues. Topics covered include: operation in a cleanroom environment, operation and use of a variety of systems including vacuum pump systems, thermal processing equipment, chemical vapor deposition systems and vacuum deposition/ etching systems. Specific materials handling issues include those arising from using de-ionized water, solvents, cleansers, organic materials, ion implementation sources, diffusion sources, photo-resists, developers, metal dielectrics and toxic, flammable, corrosive and high purity gases as well as packaging materials.
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