MFT 212 - Basic Nanofabrication Processes
Credits: 3
2 Lecture Hours 2 Lab Hours
Co-requisites: MFT 211
This course provides an overview of basic processing steps used in all applications of nanofabrication. Both top-down and bottom-up nanofabrication are included. The majority of the course details a step-by-step description of the equipment and processes needed to fabricate devices and structures such as bio-chips, Complementary Metal Oxide Semiconductor (CMOS) transistors, power devices, Microelectromechanical(MEM)devices and opt-electronic structures. Students learn the similarities and differences in both the equipment and process flows needed in the fabrication of these structures.
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