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Apr 20, 2024
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MFT 215 - Materials Modification for Nanofabrication Applications
Credits: 3
2 Lecture Hours 2 Lab Hours
Prerequisites: MFT 211 and MFT 212
Co-requisites: MFT 216
Description
This course covers the processing steps used in modifying material properties in nanofabrication. Included are applications of nano-scale devices and systems and the resulting material chemical, physical, biological or multiple-property requirements. Use of diffusion barriers, encapsulation, electromigration control, corrosion control, wettability, stress control and adhesion are studied.
Learning Outcomes
Upon successful completion of the course, the student will:
- Apply proper safety and cleanroom behavior.
- Operate materials modification equipment in a nanofabrication facility.
- Evaluate thermal budget requirements for a typical project.
- Grow gate and field oxides and implants for drain and source regions.
- Use negative photolithography to produce microfluidic devices.
- Describe particle flow in Polydimethylsiloxane (PDMS) channels.
- Recognize materials modification using ion implantation.
- Make angle measurements and correlate these with surface treatments.
- Operate a spin coater.
Listed Topics
- Thermal processes
- Surface preparations
- Oxidation fundamentals
- Barrier layer formation
- Alloying
- Grain size and mechanical properties
- Grain size and optical properties
- Materials modifications
- Spin coaters and oxide dopants
Reference Materials
Instructor-approved textbook and materials.
Approved By: Johnson, Alex Date Approved: 05/01/2012
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