Mar 29, 2024  
2018-2019 Catalog 
    
2018-2019 Catalog [ARCHIVED CATALOG]

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MFT 216 - Char/Test Nanotech Structures/Materials


Credits: 3
2 Lecture Hours 2 Lab Hours
Prerequisites: MFT 211  MFT 212 
Co-requisites: MFT 215 

This course examines a variety of measurements and techniques essential for controlling micro and nanofabrication processes. Monitoring techniques such as residual gas analysis, optical emission spectroscopy and end point detection are discussed. Characterization techniques such as scanning electron microscopy x-ray photoelectron spectroscopy, atomic probe methods, optical thin film measurements and resistivity/conductivity measurements are introduced. Basic measurements for yield analysis and process control are stressed.


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