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Apr 19, 2024
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MFT 211 - Material Safety and Equipment Overview
Credits: 3
2 Lecture Hours 2 Lab Hours
Co-requisites: MFT 212
Description
This course provides an overview of basic nanofabrication processing equipment and materials handling procedures with a focus on safety, environment and health issues. Topics covered include: operation in a cleanroom environment, operation and use of a variety of systems including vacuum pump systems, thermal processing equipment, chemical vapor deposition systems and vacuum deposition/ etching systems. Specific materials handling issues include those arising from using de-ionized water, solvents, cleansers, organic materials, ion implementation sources, diffusion sources, photo-resists, developers, metal dielectrics and toxic, flammable, corrosive and high purity gases as well as packaging materials.
Learning Outcomes
Upon successful completion of the course, the student will:
- Utilize proper safety and hygiene rules in nanofabrication processing.
- Explain the operation of vacuum pumps and measurement of vacuum pressure.
- Apply materials handling techniques.
- Handle and dispose biological materials and nanoscale particles.
- Design and build a vacuum system.
- Operate a thermal evaporator from pump down through gold deposition.
- Examine and operate a Residual Gas Analyzer (RGA).
- Analyze a vacuum processing chamber with RGA.
- Use profilometer and optical microscopes.
- Operate a Low Pressure Chemical Vapor Deposition (LPCVD) reactor.
Listed Topics
- Overview of safety, health and environmental issues
- Cleanroom operation
- Vacuum pump systems
- Vacuum accessories
- Gas delivery
- Metrology
- Thermal evaporators
- Chemical handling techniques
- Vacuum-based processing control
- Plasma-based processing
- Equipment overview
Reference Materials
Instructor-approved textbook and materials.
Approved By: Johnson, Alex Date Approved: 05/14/2013
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