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2021-2022 Catalog 
    
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MFT 211 - Material Safety and Equipment Overview


Credits: 3
2 Lecture Hours 2 Lab Hours

Co-requisites: MFT 212  

Description
This course provides an overview of basic nanofabrication processing equipment and materials handling procedures with a focus on safety, environment and health issues. Topics covered include: operation in a cleanroom environment, operation and use of a variety of systems including vacuum pump systems, thermal processing equipment, chemical vapor deposition systems and vacuum deposition/ etching systems. Specific materials handling issues include those arising from using de-ionized water, solvents, cleansers, organic materials, ion implementation sources, diffusion sources, photo-resists, developers, metal dielectrics and toxic, flammable, corrosive and high purity gases as well as packaging materials.
Learning Outcomes
Upon successful completion of the course, the student will:

  1. Utilize proper safety and hygiene rules in nanofabrication processing.
  2. Explain the operation of vacuum pumps and measurement of vacuum pressure.
  3. Apply materials handling techniques.
  4. Handle and dispose biological materials and nanoscale particles.
  5. Design and build a vacuum system.
  6. Operate a thermal evaporator from pump down through gold deposition.
  7. Examine and operate a Residual Gas Analyzer (RGA).
  8. Analyze a vacuum processing chamber with RGA.
  9. Use profilometer and optical microscopes.
  10. Operate a Low Pressure Chemical Vapor Deposition (LPCVD) reactor.
Listed Topics
  1. Overview of safety, health and environmental issues
  2. Cleanroom operation
  3. Vacuum pump systems
  4. Vacuum accessories
  5. Gas delivery
  6. Metrology
  7. Thermal evaporators
  8. Chemical handling techniques
  9. Vacuum-based processing control
  10. Plasma-based processing
  11. Equipment overview
Reference Materials
Instructor-approved textbook and materials.
Approved By: Johnson, Alex Date Approved: 05/14/2013


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