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Jul 05, 2025
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MFT 216 - Characterization, Testing of Nanotechnology Structures & Materials
Credits: 3
2 Lecture Hours 2 Lab Hours
Prerequisites: MFT 211 , MFT 212
Co-requisites: MFT 215
Description
This course explores a variety of measurements and techniques essential for controlling micro and nanofabrication processes. Monitoring techniques such as residual gas analysis, optical emission spectroscopy and end point detection are discussed. Characterization techniques such as scanning electron microscopy x-ray photoelectron spectroscopy, atomic probe methods, optical thin film measurements and resistivity/conductivity measurements are covered. Basic measurements for yield analysis and process control are stressed.
Learning Outcomes
Upon successful completion of the course, the student will:
- Apply proper safety practices to a cleanroom environment in the context of material testing.
- Select proper measurements to make for yield analysis and process control of a nanofabricated product.
- Operate measurement equipment used to determine cross sectional profiles, contact evaluation and transistor characterization.
- Discuss the applications of nanofabrication to Magnetic Force Microsocpy (MFM) and Scanning Tunneling Microscopy (STM).
- Interpret infrared (IR) spectra for identifying bonding types in materials.
- Describe the applications of Transmission Electron Microscopy (TEM).
- Differentiate between Scanning Electron Microscopy (SEM) and TEM in imaging and diffraction.
- Apply SEM and Atomic Force Microscopy (AFM) to characterize a material’s surface, microstructure and tribology.
- Use image analysis and processing software to identify and measure observed features.
Listed Topics
- Plasma process monitoring
- Residual gas analysis
- Ellipsometry and profilometry
- Electron microscopy
- Scanning probe microscopy
- Fluorescence microscopy
- Infrared spectroscopy
- Oxide electrical charactization
- Transistor characteristics
Reference Materials
Instructor-approved textbook and materials.
Students who successfully complete this course acquire general knowledge, skills and abilities that align with CCAC’s definition of an educated person. Specifically, this course fulfills these General Education Goals: - Critical Thinking & Problem Solving
- Quantitative & Scientific Reasoning
- Technological Competence
Approved By: Dr. Quintin B. Bullock Date Approved: 04/12/2024
Last Reviewed: 04/12/2024
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